Your success in the semiconductor equipment market will depend on your product conforming to leading edge semiconductor industry standards and guidelines. SEMI® (Semiconductor Equipment and Materials International) is a global organization with members from all key sectors of the semiconductor industry. The EHS (environmental health and safety) committee within SEMI's International Standards division develops standards and guidelines that are accepted worldwide as providing state-of-the-art process equipment safety to an industry that demands quality products. The flagship guideline in Semi's fleet of safety documents is SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment.
The SEMI S2 guideline defines minimum performance-based safety requirements your semiconductor manufacturing product must meet. The scope of these requirements covers potential health and safety hazards such as mechanical, electrical, chemical, ionizing and non-ionizing radiation, seismic, ventilation, environmental and ergonomics. There are many additional SEMI guidelines that are referenced by or otherwise support SEMI S2. And more are on the way.
- S1 Equipment Safety Labels
- S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- S3 Heated Chemical Baths
- S4 Segregation/Separation of Gas Cylinders Contained in Cabinets
- S5 Flow-Limiting Devices
- S6 Ventilation
- S8 Ergonomics Engineering
- S9 Electrical Design Verification Tests
- S10 Risk Assessment
- S11 Equipment Mini-environments
- S12 Equipment Decontamination
- S13 Operation and Maintenance Manuals
- S14 Fire Risk Assessment and Mitigation
- S15 Toxic and Flammable Gas Detection Systems
- S16 Equipment Disposal
- S17 Unmanned Transport Vehicle (UTV) Systems
- S18 Silane Family Gases Handling
- S19 Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
- S20 Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control
- S22 Electrical Design
- SEMI S23-0708 is the Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment.
The SEMI® guidelines are frequently revised. To stay ahead in this market, you must stay informed of these changes. TÜV SÜD engineers actively participate in the SEMI® standards development and revision process. We are prepared to advise you on what is needed now, and what may be required in the future.
Where no other appropriate guidelines exist, conformance of equipment to portions of the S2 guideline have been required by some municipal authorities as a means to ensure equipment meets electrical and fire safety requirements. Companies such as Intel, Texas Instruments, IBM, AMD, SGS Thompson, Phillips, and Motorola conform to S2.
TÜV SÜD Product Service Machinery Evaluation personnel have the expertise and experience to provide you with industry-accepted equipment assessment services and reports for SEMI S2 and related guidelines.
In addition to offering complete reports based on equipment testing, inspection and document review, we can provide you with our TÜV SÜD SEMI Mark, a third-party certification mark demonstrating your equipment has met the guideline requirements. This allows your end user to not only quickly identify that a machine has been evaluated, but that it has been evaluated by one of the most recognized names in product safety.
Most semiconductor manufacturing equipment will be used by customers who have factories placed worldwide. Therefore, the equipment may have to be installed in the European Union now, or at some point in the future, as equipment is moved from site to site. In such a case, CE Marking will be a key issue. For more information on how TÜV SÜD America can assist you in understanding and achieving the requirements for CE Marking your equipment, visit our CE Marking page.
For more information on Semiconductor Testing Services, contact us.